Sliding PECVD Furnace System with Vacuum Pump Station 1200C Max to Deposit Thin Films

Product Model: SUP-OTF-1200X-5L-PE

Product Description: SUP-OTF-1200X-5L-PE is a PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 130ODx122ID, mm quartz tube furnace, and high-quality vacuum pump with a cold trap. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) up to 4" wafer.

Product Description

SUP-OTF-1200X-5L-PE is a Plasma Enhanced Chemical Vapor Deposition tube furnace system (PECVD Furnace System), which consists of 300W RF plasma source, 130ODx122ID, mm quartz tube furnace, and high-quality vacuum pump with a cold trap. The PE-CVD Furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) up to 4" wafer.

Product Parameters

Single Zone 1200°C

Split Tube furnace

• Max 1200ºC, and for 1100ºC continuous heating

• Programmable precision digital temperature controllers with 30 segments.

• Heating Zones: 880 mm • Quartz Tube Size: 130 ODx122 IDx2000L mm

• Input power: 208 – 240V AC input, single phase at max. 7KW.

• Vacuum sealed flanges are included for immediate use.

Optional: three-zone furnace with 24" heating zone can be replaced at extra cost

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Plasma RF

Power Supply

• Output Power: 5 -300W adjustable with ± 1% stability

RF frequency: 13.56 MHz ±0.005% stability

Reflection Power: 200W max.

Matching: Automatic

RF Output Port: 50 Ω, N-type, female

Noise: <50 dB.

Cooling: Air cooling.

Power: 208-240VAC, 50/60Hz

Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange

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Pressing Tube

• Quartz Tube: 130 ODx122 IDx2000L mm (5"x 79"). included.

• 5" SS vacuum flange with valve and K25Vacuum port is included

• One Anti-corrosive Pressure Gauge is installed on the flange

◦ 3.8x10-5 to 1125 Torr measurement range

◦ Anti-corrosive, gas-type independent

◦ High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

◦ Fast atmospheric detection eliminates waiting time and shortens process cycle

◦ We provide extra 24V 7Ah batteries pack as a power supply for pressure gauge which is sufficient for 30-40 hrs battery life per charge.

Vacuum Pump

and valve

• EQ-FYP-Pump is installed inside the heavy-duty mobile cart.

• One Cold Trap for Recovering Condensables is included

• KF25 adapter and stainless steel pipe are connected between the pump and tube flange with precision ball valve for user's plug and immediately use.

• 10E-2 Torr vacuum can be achieved inside the processing tube.

Temperature Controller

• MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.

• Built-in PID Auto-Tune function with overheating & broken thermocouple protection.

• Over-temperature protection and alarm allows for operation without attendant(s).

• +/- 1 ºC temperature accuracy.

• RS485 Communications Port.

- Advanced Temperature Control (Optional)

- MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar.

- You may upgrade the temperature controller to the Eurotherm 350- 4 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD.

Dimensions

Dimensions:

• Furnace: 1100 X 450 x 670 mm

• Net weight: 220 lbs

• Shipping weight: 350 lbs

Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Split Tube <a href=https://www.supsemi.com/en/PECVD-Furnace.html target='_blank'>PECVD Furnace</a>.png