Small Batch PECVD Furnace System ( CCP type ) for 12 pcs 6-inch Wafer Pilot Test Max 1100C

Product Model: SUP-PECVD-8-16

Product Description: PECVD-8-16 is a CCP type PECVD system for a small batch of 12 pcs 6" wafer. The system consists of an 8"ID quartz tube furnace up to 1100°C, a batch type graphite boat for 12 wafers, 1000W plasma generator, and a 4-channel programmable gas delivery system. It is an excellent tool for a pilot test of thin-film research of solar cell and 2D materials.

Product Description

PECVD-8-16 is a CCP type PECVD system for a small batch of 12 pcs 6" wafer. The system consists of an 8"ID quartz tube furnace up to 1100°C, a batch type graphite boat for 12 wafers, 1000W plasma generator, and a 4-channel programmable gas delivery system. It is an excellent tool for a pilot test of thin-film research of solar cell and 2D materials.

Product Parameters

Furnace structure

• High purity alumina fibrous insulation for max energy saving

• Three heating zones to achieve 600 mm constant temperature zone up to 1100ºC.

• 8.5" OD 5 8" ID quartz tube with vacuum-sealed flanges

• One sliding rail driven by a DC motor facilitates loading of the graphite boat and samples

• High purity graphite boat can carry up to 12 circular or rectangular 6" wafers

• 1000W RF (13.5MHz) power supply is included for plasma generation.

• Four-channel gas mixing and delivery system is included for deposition of precursors

• A vacuum pump (oil or dry type) is available upon request.

Power

• 208-240 VAC, single phase, 50/60 Hz

• 9 kW

• Power cord is included without a plug. MTI may help customer add a power plug at an extra cost.

Quartz tube

& flanges

• 8.5" O.D x 8.2" I.D x 51" Length

• One quartz tube is included, and the spare tube is available as an option.

• SS304 flanges are included with the KF40 vacuum port & valve and gas inlet & outlet are included

• Built-in dual sliding rails and DC motor drives the flange and sample boat in and out

Graphite Boat

• Graphite boat made of high purity graphite ( Japan) with RF electrodes

• 12 slots （ 4x3 ) slot to carry 6" x6" x0.5 mm or 6" diameter wafers

• Customized graphite boat ( 4x4 or 5 x4 ) is available upon request at the extra cost

Graphite Boat.png

Furnace

• Heating element: NiCrAl Resistance Wire

• Heating Zone: Three heating zone ( 300 mm + 300 mm + 300mm )

• Constant temperature zone: 600 mm within +/- 2ºC ( If 3 zone at the same temp.)

• Working temperature: 400 -1100°C

• Max. heating/cooling rate: 10°C/min

Temperature

Controller

• Three Eurotherm 3000 temperature controllers with 24 segments programmable

• Three K type thermal couples are installed.

• Temperature accuracy: +/- 0.1°C

• Software and PC interface module is included

Temperature Controller.jpg

RF Plasma

Generator

• Output Power: 20 -1000W adjustable with ± 1% stability

• RF frequency: 13.56 MHz ±0.005% stability

• Matching: Automatic with variable air capacitor

• Cooling: Air cooling

• Noise: <50 dB

• Power: 110 - 240VAC, 50/60Hz

Gas Delivery

System

• Four MFCs are built in a movable cart with accuracy: ±1.5%FS and repeatability: ±0.2%FS

- Controller 1: 0~100 SCCM

- Controller 2: 1~199 SCCM

- Controller 3: 1~199 SCCM

- Controller 4: 1~499 SCCM

• Touch screen panel to gas delivery parameters

• RS485 port is installed for remote control by a PC

• Customized software is available to match receipts upon request at an extra cost.

• Range of each MFCs are interchangeable at an extra cost.

Dimensions

Dimensions:

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Weight: 500kg

Warranty

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

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