Product Model: OTF-1200X-PEC4LV
Product Description: OTF-1200X-PEC4LV is acompact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump.
Product Description
The PECVD Furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid-state, and benefits:
• Lower temperature processing compared to conventional CVD.
• Film stress can be controlled by high/low frequency mixing techniques.
• Control over stoichiometry via process conditions.
• Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Product Parameters
Split Tube Furnace | • 1200°C Max. working temperature for < 60 minutes • 1100°C Max for continuous heating • 30 segments programmable precision digital temperature controller • 440 mm length single heating zone and 150 mm length constant temperate zone • High purity quartz tube optional from • One pair of the vacuum-sealed flange with valves - 2"OD x 1.7"ID x 48" Length - 3.14"OD x 2.83"ID x 48'' Length • Input power: 208 – 240V AC input, a single phase at max. 4KW |
Plasma RF Power Supply | • Output Power: 5 -300W adjustable with ± 1% stability • RF frequency: 13.56 MHz ±0.005% stability • Reflection Power: 200W max. • Matching: Automatic • RF Output Port: 50 Ω, N-type, female • Noise: <50 dB. • Cooling: Air cooling. • Power: 208-240VAC, 50/60Hz • Note: This RF power supply can accept 50 - 80 mm Max. quartz tube by changing flange |
Anti-corrosive Pressure Gauge | • 3.8x10-5 to 1125 Torr measurement range • Anti-corrosive, gas-type independent • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection • Fast atmospheric detection eliminates waiting time and shortens the process cycle • Easy to exchange plug & play sensor element |
Vacuum Pump and valve | • Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr. • KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve • Digital vacuum pressure gauge and display are installed with the furnace |
Mass Flowmeter | • 4-channeled Gas Mixing • Made of 316 stainless steel valve • Gas mixing tank: Φ80X120mm • 600mm(L) x 745mm(W) x 700mm(H) • 6" color touch screen control panel to make parameter setting at easy. • Touchscreen Control and PC remote switchable. • 23W per channel • AC 220V/50Hz Single phase |
Compliance | • CE Certified • NRTL or CSA certification is available upon request at extra cost. |
Temperature Control | • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time. • Built-in PID Auto-Tune function with overheating & broken thermocouple protection. • Over-temperature protection and alarm allow for operation without attendant(s). • +/- 1 ºC temperature accuracy. • RS485 Communications Port. |
Dimensions | Dimensions: • Furnace: 550mm(L) x 380mm(W) x 520mm(H) • 3 Bottom Mobile case together: 1800mm(L) x 850mm(W) x 700mm(H) |
Warranty | One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below). |
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Contact: Bruce Liu
WhatsApp: +86-18059149998
Tel: +86-18059149998
Email: sales@supsemi.com
Add: Room 1402, Building 1, No. 89 Xibeilu, Xishancun, Xibei Street, Xinluo District, Longyan City, Fujian Province
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