Auto-Sliding Two-Zone PECVD Furnace with RF Plasma Pre-Heater CVD coating 1200C Max

Plasma RF 

Power Supply

• Output Power:           5 -300W adjustable with ± 1% stability.

• RF frequency:           13.56 MHz ±0.005% stability.

• Reflection Power:       200W max.

• Matching:                  Automatic

• RF Output Port:         50 Ω, N-type, female

• Noise:                       <50 dB.

• Cooling:                     Air cooling.

• Power:                      208-240VAC, Single Phase, 50/60Hz

Pre-heating 

furnace

• Small tube furnace with 200mm length single heating zone

Max. temperature:  1100ºC

30 segment programmable temperature control

The vapor goes through the heater first before getting in the RF Plasma generator.

It can put solid material in the heater for evaporation and mixing with the vapor phase.

Quartz Tube:   50mm OD x 44mm ID x 2200 mm L   ( 80mm OD tube is available at extra cost）

Vacuum flange:  included

  Anti-corrosive 

Pressure Gauge

• 3.8x10-5 to 1125 Torr measurement range

• Anti-corrosive, gas-type independent 

• High accuracy and reproducibility at the atmosphere for reliable atmospheric pressure detection

• Fast atmospheric detection eliminates waiting time and shortens the process cycle

• Easy to exchange plug & play sensor element

Vacuum Pump 

Station & Valves

• 240L/m Heavy Duty Dual-Stage mechanical pump is installed inside the heavy-duty mobile cart

• KF25 adapter and stainless steel pipe are connected between the pump and tube flange with a precision ball valve for the customer's plug-and-play

• 10E-2 Torr vacuum can be achieved inside the processing tube

Sliding mechanism

• Sliding rail and screws are built into the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.

• Sliding speed is adjustable from  0-70 mm/s

Heating & 

Cooling Rates

• RS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from here)

• To achieve Max. heating rate,  the user must preheat the furnace to the desired temperature, then slide the furnace to the sample zone of the tube

• To achieve the Max. cooling rate, push the heated furnace from the hot zone to the cold zone

Heating Rate: 

15°C/sec (RT - 150°C);

10°C/sec (150°C - 250°C);

7°C/sec (250°C - 350°C);

4°C/sec (350°C - 500°C);

3°C/sec (350°C - 550°C);

2°C/sec (550°C - 650°C);

1°C/sec (650°C - 800°C);

0.5°C/sec (800°C - 1000°C);

Cooling Rate:

15°C/sec (1000 - 950°C);

10°C/sec (950°C - 900°C);

7°C/sec (900°C - 850°C);

4°C/sec (850°C - 750°C);

2°C/sec (750°C - 600°C);

1.5°C/sec (600°C - 500°C);

1°C/sec (500°C - 400°C);

0.5°C/sec (400°C - 300°C);

Furnace: 550 x 380 x 520  mm 

Sliding Rail: dual rail with 1750 mm length

Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.

Net weight: 220 Lbs.

Shipping Weight: 1200lbs.

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).