1200C Rotatable Two-Zone PE-HPCVD Rotary Furnace with In-situ Evaporator Channel MFC Vacuum Pump

Product Model: OTF-1200X-S-II-PEC4

Product Description: This 1200°C rotatable two-zone PE-HPCVD (Plasma-Enhanced High-Pressure Chemical Vapor Deposition) rotary furnace is designed for advanced thin film deposition. It features an in-situ evaporator channel for efficient material handling and includes a mass flow controller (MFC) for precise gas delivery. The integrated vacuum pump ensures optimal pressure control during the deposition process, making this system ideal for various applications in semiconductor manufacturing, optoelectronics, and materials research.

Product Description

OTF-1200X-S-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

Product Parameters

System Structure	• Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces processing-temperature. ( Plasma generator is at the right side of Pic ) • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity. • Four-channel gas mixing station with MFCs provide precise control of gas delivery. • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you to sublimate solid precursors for the needs of Hybrid Physical-Chemical processing.
Two-Zone Rotary Furnace	• Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating. • Two PID temperature controllers with 30 segments programmable. • Input Power: 208 – 240 VAC, single phase at max. 1.5KW. • High purity Alumina fibrous insulation for max. energy saving. • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM. • Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone.
Plasma RF Power Supply	• Output Power: 5 -300W adjustable with ± 5% stability. • RF frequency: 13.56 MHz ±0.005% stability. • Reflection Power: 100W max. • Matching: Automatic. • Power: 208-240VAC, Single Phase, 50Hz.
Evaporation Boat	• Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating • 0.7ml alumina crucible with tungsten heating coil surrounded. • K type thermocouple inserted for accurate temperature measurement of the source material. • Working current: <= 30 A.
Sealing Flanges	• Standard: 2'' O.D Fused quartz processing tube • One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use. • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube. • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines)
Tube Rotation Speed	• 0 - 5 RPM variable.
Vacuum Pump & Gauge	• EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs. • KF25 adapter and stainless steel bellows are connected between the pump and tube flange. • 10E-2 Torr vacuum can be achieved inside the processing tube. • Note: Vacuum Gauge is available at additional cost, please contact us.
MFC Gas Mixing Station	• Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically. - MFC 1: Gas flow range from 0~100 SCCM - MFC 2&3: Control range from 0~200 SCCM - MFC 4: Control range from 0~500 SCCM • Gas inlet/outlet fittings: 6mm O.D tube fitting • Power: 208-240VAC 50/60Hz • Stainless steel needle valves for manually ON/OFF control of gas supply. • Large PLC touch screen control enables easy flow rate settings
Temperature Control	• Two heating zone design with an individual temperature controller. • Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments. • Built-in overheating & broken thermocouple protection. • Over-temperature protection and alarm allow for operation without attendant(s). • +/- 1 ºC temperature accuracy. • Three K-type thermocouples (one for each zone). • RS485 Communications Port.
Dimensions	• Furnace: 1400mm L x 600mm W x 1250mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H • Net weight: 400 Lbs. • Shipping Weight: 500lbs.
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).