1100C Rotatable Two-Zone PECVD Furnace Plasma-Enhanced Chemical Vapor Deposition System with Vacuum Pump

Product Model: OTF-1200X-S-II-PECVD

Product Description: This 1100°C rotatable two-zone PECVD (Plasma-Enhanced Chemical Vapor Deposition) furnace is designed for efficient thin film deposition. It features a dual-zone heating system to ensure uniform temperature distribution and enhanced deposition control. The integrated vacuum pump facilitates optimal pressure management during the deposition process, making this system suitable for a variety of applications in semiconductor fabrication, optoelectronics, and advanced materials research.

Product Description

OTF-1200X-S-II-PECVD is a 1000ºC Rotatable Two-Zone Plasma-Enhanced Chemical Vapor Deposition system (PECVD Furnace). It consists of a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, and High-Performance Vacuum Pump. Such a system is an excellent tool for heat-treating inorganic compound powders with surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

Product Parameters

System Structure

• Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces processing-temperature

• Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity.

• Note: Gas tank is not included

Two-Zone

Rotary Furnace

• Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating.

• Two PID temperature controllers with 30 segments programmable.

• Input Power: 208 – 240 VAC, single phase at max. 1.5KW.

• High purity Alumina fibrous insulation for max. energy saving.

• Gear DC motor drives quartz tube with variable speed 2 - 10 RPM.

• Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone.

Plasma RF

Power Supply

• Output Power: 5 -300W adjustable with ± 5% stability.

• RF frequency: 13.56 MHz ±0.005% stability.

• Reflection Power: 100W max.

• Matching: Automatic.

• Power: 208-240VAC, Single Phase, 50Hz.

Sealing Flanges

• Standard: 2'' O.D Fused quartz processing tube, please click the pic on the left for details

• One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use

• A pair of 1'' O.D quick disconnect flange with KF25 port is installed on each end of the tube

• Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines)

Left Sealing Flanges.jpg Right Sealing Flanges.jpg

Tube Rotation Speed

• 0 - 5 RPM variable.

Vacuum Pump & Gauge

• Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs

• KF25 adapter and stainless steel bellows are connected between the pump and tube flange

• 10E-2 Torr vacuum can be achieved inside the processing tube

• Note: Vacuum Gauge is available at additional cost, please click underline and to order

Temperature Control

• Two heating zone design with an individual temperature controller.

• Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments.

• Built-in overheating & broken thermocouple protection.

• Over-temperature protection and alarm allow for operation without attendant(s).

• +/- 1 ºC temperature accuracy.

• Two K-type thermocouples (one for each zone).

• RS485 Communications Port.

Dimensions

• Furnace: 1400mm L x 600mm W x 1240mm H (with lid opened)

• Net weight: 400 lbs

• Shipping Weight: 500lbs

Rotary PE<a href=https://www.supsemi.com/en/CVD-Furnace.html target='_blank'>CVD Furnace</a>.jpg

Volumetric Feeder and

Collector Tank (Optional)

• EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treatment. Please contact us to order.

• Stainless steel collection tank ( 2 Liter Capacity ) can be installed on the other end of the processing tube to gather the fired powder without exposure to air. Please contact us to order.

• Note: contact us for customization details.