Rotary 1200C PE-HPCVD Furnace with 4 Channel MFC In-situ Evaporator Vacuum Pump

Rotary 1200C PE-HPCVD Furnace with 4 Channel MFC In-situ Evaporator Vacuum Pump

Product Model: OTF-1200X-S-II-PECVD

Product Description: This rotary PE-HPCVD (Plasma-Enhanced High-Pressure Chemical Vapor Deposition) furnace operates at a maximum temperature of 1200°C and features a four-channel mass flow controller (MFC) for precise gas delivery. The in-situ evaporator enhances material handling efficiency, while the integrated vacuum pump ensures optimal pressure control during the deposition process. This system is designed for advanced thin film deposition applications in semiconductor manufacturing and materials research.

Product Description

OTF-1200X-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists of a Tiltable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four-Channel MFC Gas Delivery, and High-Performance Vacuum Pump. Such a complete system is an excellent tool for heat-treating inorganic compound powders with superior temperature and surface coating uniformity.

Product Parameters

System Structure	• 0~25° adjustable tilt frame assists smooth powder loading/unloading • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces the needs for high-temperature process • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity • Four-channel gas mixing station with MFCs provide precise control of gas delivery • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing
Two-Zone Rotary Furnace	• Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating • Two PID temperature controllers with 30 segments programmable. • Input Power: 208 – 240VAC, a single phase at max. 2.5KW. • High purity Alumina fibrous insulation for max. energy saving • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM • The split cover enables faster cooling and easy operation • Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone • Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.
Plasma RF Power Supply	• Output Power: 5 -300W adjustable with ± 1% stability. • RF frequency: 13.56 MHz ±0.005% stability. • Reflection Power: 100W max. • Matching: Automatic • RF Output Port: 50 Ω, N-type, female • Noise: <50 dB. • Cooling: Air cooling. • Power: 208-240VAC, Single Phase, 50/60Hz
Evaporation Boat	• Working temp: 1300ºC Max(<1hrs)., and 1200ºC for continuous heating (1500ºC with the furnace chamber heated to 800ºC) • 0.7ml alumina crucible with tungsten heating coil surrounded. • S type thermocouple inserts for accurate temperature measurement of the source material. • 500W DC evaporation power supply with max. operating current @ 30Amps
Quartz Tube	• Standard: 4'' O.D Fused quartz processing tube. • One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use
Furnace Tilt Angle	~30°
Sealing Flanges	• A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting.
Tube Rotation Speed	• 0 - 5 RPM variable.
Vacuum Pump & Gauge	• EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please contact us for more detail specs. • KF25 adapter and stainless steel bellows are connected between pump and tube flange. • 10E-2 Torr vacuum can be achieved inside the processing tube. • Note: Vacuum Gauge is available at additional cost, please contact us for more detail specs.
MFC Gas Mixing Station	• Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically. - MFC 1: Gas flow range from 0~100 SCCM - MFC 2&3: Control range from 0~200 SCCM - MFC 4: Control range from 0~500 SCCM • Gas inlet/outlet fittings: 6mm O.D tube fitting • Power: 208-240VAC 50/60Hz • Stainless steel needle valves for manual ON/OFF control of gas supply. • Large PLC touch screen control enables easy flow rate settings
Temperature Control	• Two heating zone design with an individual temperature controller. • Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments. • Built-in overheating & broken thermocouple protection. • Over-temperature protection and alarm allow for operation without attendant(s). • +/- 1 ºC temperature accuracy. • Three K-type thermocouples (one for each zone). • RS485 Communications Port.
Dimensions	• Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H • Net weight: 400 Lbs. • Shipping Weight: 500lbs.
Volumetric Feeder and Collector Tank (Optional)	• EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treatment. Please contact us to order. • Stainless steel collection tank ( 2 Liter Capacity ) can be installed on the other end of the processing tube to gather the fired powder without exposure to air. Please contact us to order. • You may add a vacuum gate valve on the top of the sample collecting tank for air-sensitive material. • Note: contact us for customization details.
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance	• CE Certified • NRTL or CSA certification is available at an extra cost