Lab-scale Roll to Roll PECVD Tube Furnace System with MFC Gas Delivery Vacuum Pump

Plasma RF 

Power Supply

• Output Power: 5 - 300W adjustable with ± 1% stability

• RF frequency: 13.56 MHz ±0.005% stability

• Matching: Automatic

• RF Output Port: 50 Ω, N-type, female

• Noise: <50 dB. 

• Cooling: Air cooling

• Power: 208-240VAC, 50/60Hz, single phase

R2R Vacuum 

Chambers

• Two vacuum chambers are located at two ends of the furnace and connected with the quartz tube

• The reeling rollers for a substrate in and out are located inside the vacuum chamber 

• The reeling speed for the substrate is adjustable from 1- 400mm/min

• The precision tension control mechanism is built in form 0 - 1000g)

• Max. movable substrate: 65 mm Width  for 80mm OD tube

• One roll of copper foil with 65 mm width and 0.025 mm thick (~5 kg) is included for customer practice

• 100mm OD tube is available upon request, which can feeding substrate with max. width 80 mm

• Roll to Roll mechanism with speed controller and sealed flange without furnace may available upon request.

Three-Channel Gas 

Delivery Station

• Max. Pressure: 3x106 Pa

• Accuracy: ±1.5% FS

• Liner: ±（0.5-1.5）%F.S.

• Duplicate accuracy: ±0.2%F.S.

• Controlling Range:

• Controller 1: 0~100 SCCM (Ar gas calibration)

• Controller 2: 1~199 SCCM (H2 gas calibration)

• Controller 3: 1~499 SCCM (Methane calibration)

• Warning: H2 and Methane must be installed nearby the furnace to alarm gas leaking.

• Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 Torr.

• KFD25 adapter and stainless steel pipe are connected between the pump and tube flange with the ball valve.

• Digital vacuum pressure gauge and display are installed with the furnace.

• The oil-less pump and gas mixing & delivery system are  available and PID pressure controlled vacuum system is available upon request at an extra cost.

Anti-corrosive 

Pressure Gauge

• Anti-corrosive, gas-type independent.

• High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection.

• Fast atmospheric detection eliminates waiting time and shortens process cycle.

• Easy to exchange plug & play sensor element.

• 7" touch screen control panel which will control temperature, gas flow rate, plasma power 

• PC control software is available upon request for remote operation by Laptop computer (Must buy a laptop with pre-installed software)

• Two temperature controllers with 30 programmable segments with  +/- 1 ºC temperature accuracy

• Built-in PID Auto-Tune function with overheating & broken thermocouple protection

• Over-temperature protection and alarm allow for operation without attendant(s)

• RS485 Communications Port with PC operation software

• You may upgrade the temperature controller to the Eurotherm Controller with 0.1 ºC accuracy with software

• We may upgrade the furnace to 5" Tube, and grow 4" width film

• The larger diameter tube up to 8" OD for the roll to roll CVD system is available upon request.

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

• CE Certified

• NRTL (UL61010) or CSA certification is available at extra cost.