Rotatable Three -Zone PECVD Furnace System core-shell structure particles with 5-inch Tube for powder surface cleaning

Product Model: OTF-1200X-III-R5-PECVD

Product Description: This rotatable three-zone PECVD (Plasma-Enhanced Chemical Vapor Deposition) furnace system is designed for processing core-shell structured particles. It features a 5-inch tube specifically for powder surface cleaning applications. The three-zone configuration allows for precise temperature control and uniform deposition across the particles, enhancing surface properties and ensuring effective cleaning. This system is ideal for research and development in materials science and nanotechnology.

Product Description

OTF-1200X-III-R5-PECVD is a 1200ºC Rotatable Three -Zone Plasma-Enhanced Chemical Vapor Deposition (R-PE-CVD) system that is designed fro powder surface coating to form core-shell structure particles at a relatively lower temperature, also it can be used for powder surface cleaning The automatic powder feeding and receiving system is built in for continuous powder coating. Temperature, plasma power, and 4-channel gas MFC is controlled by a touch screen panel and laptop computer for easy operation.

Product Parameters

System Structure	• 0~25° adjustable tilt frame assists smooth powder loading/unloading • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma-enhanced processing which significantly reduces the needs for high-temperature process • Gear-driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity • Four-channel gas mixing station with MFCs provide precise control of gas delivery • Airtight powder feeder and receiver are included for continuous powder coating processing up to 1000 g.
Three-Zone Rotary Furnace	• Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating • Three digital temperature controllers with 30 segments programmable and +/-0.1 oC accuracy. • Input Power: 208 – 240VAC, a single phase at max. 4.0 KW. • The split cover enables faster cooling and easy operation • Three heating zones: 6"+ 12"+ 6", total 24" ( 609 mm) • Constant temperature zone: 480 mm length +/-2ºC • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
Plasma RF Power Supply	• Output Power: 5 -300W adjustable with ± 1% stability. • RF frequency: 13.56 MHz ±0.005% stability. • Reflection Power: 100W max. • Matching: Automatic • RF Output Port: 50 Ω, N-type, female • Noise: <50 dB. • Cooling: Air cooling. • Power: 208-240VAC, Single Phase, 50/60Hz
Quartz Tube	One specially designed 5'' O.D Fused quartz processing tube is included
Sealing Flanges	• A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the fireline or downstream attachments (such as gas, powder, and electrical delivery lines)
Tube Rotation Speed	• 0 - 5 RPM variable.
Vacuum Pump & Gauge	• EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please contact us for more detail specs. • KF25 adapter and stainless steel bellows are connected between pump and tube flange. • 10E-2 Torr vacuum can be achieved inside the processing tube. • Note: Vacuum Gauge is available at additional cost, please contact us for more detail specs.
Furnace Tilt Angle	0~25°
MFC Gas Mixing Station	• Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control the gas flow rate automatically. - MFC 1: Gas flow range from 0~100 SCCM - MFC 2&3: Control range from 0~200 SCCM - MFC 4: Control range from 0~500 SCCM • Gas inlet/outlet fittings: 6mm O.D tube fitting • Power: 208-240VAC 50/60Hz • Stainless steel needle valves for manual ON/OFF control of gas supply. • Large PLC touch screen control enables easy flow rate settings
Temperature Control	• Two heating zone design with an individual temperature controller. • Precise PID control of heating, cooling rate, and dwell time, 30 programmable segments. • Built-in overheating & broken thermocouple protection. • Over-temperature protection and alarm allow for operation without attendant(s). • +/- 1 ºC temperature accuracy. • Three K-type thermocouples (one for each zone). • RS485 Communications Port.
Dimensions	• the measurement is measured approximately: • Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); • Gas Mixing Station: 600mm L x 850mm W x 700mm H; • Net weight: 400 Lbs. • Shipping Weight: 500lbs.
Volumetric Feeder and Collector Tank (Optional)	• EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating with adjustable feeding speed 0 - 97 ml/minute. Please click the pic.1 on the left. • Stainless steel collection tank ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details.
Warranty	One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
Compliance	• CE Certified • NRTL or CSA certification is available at an extra cost