PLC-Controlled Infrared Spray Spin Coater for Precision Semiconductor Coating

Product Description

1. Overview:

The VTC-200-4P spray spin coater is suitable for semiconductor processes, photolithography, and surface coating applications. 

2. Material and Features:

The equipment's chamber is made of polypropylene, which features heat resistance, electrical insulation, and excellent wear resistance, meeting various customer process requirements.

3. Power and Motor:

The rotating section, temperature control section, and liquid injection section each use independent power sources. The equipment's rotating shaft is driven by a servo motor, which starts quickly and operates more stably, ensuring uniformity and consistency in film thickness.

4. Control System:

The servo motor speed control system uses a highly interference-resistant PLC programmer, ensuring that the main spindle operates with high precision and stability at speeds ranging from 100 to 2000 RPM.

5. Operating Stages:

The coater has two operational phases during its operation, which can be set according to process requirements before startup. 

6. Sample Handling:

For sample fixation, vacuum suction cups are used, allowing for easy placement and removal while simplifying operation.

7. Noise Reduction:

Additionally, the installation structure incorporates shock absorption measures to reduce noise during operation. The upper cover of the coater's chamber has a heating function, which can heat samples, facilitating the coating process for viscous film materials.

8. Advantages and Applications:

The VTC-200-4P spray spin coater is easy to operate, convenient to clean, and compact in size. It is primarily used in laboratories of universities and research institutions for film generation processes.

Product Features

1. Sample Fixation:

The machine uses rubber suction cups and magnetic steel plate templates to secure samples, allowing for easy placement and removal while simplifying operation. The sizes of the rubber suction cups and magnetic steel plate templates can be customized as needed.

2. Infrared Heating:

The upper cover of the machine features an infrared heating function, which maintains a stable temperature

3. Nozzle Design:

The upper cover has four sets of nozzles that spray the colloid in a mist onto the surface of the sample, resulting in a more uniform film.

4. Independent Power Sources:

The motor, temperature control section, and liquid injection section each use independent power sources. The motor speed control system employs a highly interference-resistant PLC, providing intuitive and reliable numerical displays, with adjustable speeds ranging from 100 to 2000 RPM.

5. Operation Phases:

The coater has two operational phases during its operation, allowing for parameter settings of "Time 1," "Speed 1," "Time 2," and "Speed 2" according to process requirements before startup. After setting, the coater first operates at the parameters defined for "Speed 1" for the duration set in "Time 1" (low speed), enabling gradual dispersion of the coating material. Once "Time 1" ends, the machine automatically enters the "Time 2" phase and operates at the parameters set for "Speed 2" (high speed), achieving a more uniform coating.

6. Quick Startup and Stability:

The spray spin coater starts quickly and maintains stable speeds, ensuring uniformity and consistency in film thickness.

7. Noise Reduction:

The installation structure incorporates shock absorption measures to reduce noise during operation.

8. Durable Materials:

The chamber is made of polypropylene, extending its service life and enhancing its chemical corrosion resistance and excellent stress cracking resistance. The machine body features a cast aluminum structure, making it sturdy, durable, and lightweight.

Product Parameters

Standard Accessories

Optional Accessories

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