Dual Sidable RTP Tube Furnace for thermal CVD with 50 mm Tube Flanges Max 1200C

Furnace Structure

1. Both furnaces are double-layer steel structures with 1200°C max. working temperature

2. Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone

3. One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.

4. Vacuum flanges are installed for immediate use.

Power

 AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required

 2.5 KW in total

1200°C (<1 hour)

Continuous Temperature

1100°C

Heating Rate:

 15°C/sec (RT - 150°C);

 10°C/sec (150°C - 250°C);

  7°C/sec (250°C - 350°C);

  4°C/sec (350°C - 500°C);

  3°C/sec (350°C - 550°C);

  2°C/sec (550°C - 650°C);

  1°C/sec (650°C - 800°C);

 0.5°C/sec (800°C - 1000°C);

Cooling Rate:

15°C/sec (1000 - 950°C);

10°C/sec (950°C - 900°C);

7°C/sec (900°C - 850°C);

4°C/sec (850°C - 750°C);

2°C/sec (750°C - 600°C);

1.5°C/sec (600°C - 500°C);

1°C/sec (500°C - 400°C);

0.5°C/sec (400°C - 300°C);

Note:

The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

  Heating Zone Length

200mm( ~8")  for each furnace

Constant Temperature 

Zone

60 mm (+/-1°C @ 400-1200°C)

Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.

Built-in over-temperature alarm and protection allow for operation without an attendant.

Two K-type thermal couples are included. 

Double sliding rail made by Cr-plated steel

Sliding length: 1200 mm

One slide-stopping clamp is included for holding the position of the furnace.

CE Certified

NRTL or CSA certification is available upon request at extra cost. 

Dimensions: 

1. Furnace: 340 x 300 x 400 mm

2. Total:1600 x 430 x 500 mm ( furnaces + sliding )

Weight: 102 Kg

One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).